Nakamatsu, Ken-Ichiro: search on Z-Library

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1

UV-Curable Resins Appropriate for UV Nanoimprint

Iyoshi, Shuso, Miyake, Hiroto, Nakamatsu, Ken-ichiro, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2008

Language:

english

File:

PDF, 724 KB

english, 2008

2

Nanoimprint and Lift-Off Process Using Poly(vinyl alcohol)

Nakamatsu, Ken-ichiro, Tone, Katsuhiko, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 150 KB

english, 2005

3

Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy

Okada, Makoto, Iwasa, Masayuki, Nakamatsu, Ken-ichiro, Yamada, Noriko, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 303 KB

english, 2008

4

UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by room-temperature nanoimprint

Kang, Yuji, Okada, Makoto, Nakamatsu, Ken-Ichiro, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2009

Language:

english

File:

PDF, 1.07 MB

english, 2009

5

10.4139/sfj.59.648

NAKAMATSU, Ken-ichiro, MATSUI, Shinji

Journal:

Journal of The Surface Finishing Society of Japan

Year:

2008

File:

PDF, 1.23 MB

2008

6

Structure Transformation of Bended Diamond-Like Carbon Free-Space Nanowiring by Ga Focused-Ion-Beam Irradiation

NAKAMATSU, Ken-ichiro, MATSUI, Shinji

Journal:

IEICE Transactions on Electronics

Year:

2016

Language:

english

File:

PDF, 933 KB

english, 2016

7

Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film

Nakamatsu, Ken-ichiro, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2006

File:

PDF, 1.29 MB

2006

8

Effect of UV Irradiation on Microlens Arrays and Line-and-Spacing Grating Fabricated by Room-Temperature Nanoimprinting Using Organic Spin on Glass

Nakamatsu, Ken-ichiro, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2008

File:

PDF, 419 KB

2008

9

Durability of antisticking layer against heat in nanoimprinting evaluated using scanning probe microscopy

Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 516 KB

english, 2009

10

Fabrication of Fine Electron Biprism Filament by Free-Space-Nanowiring Technique of Focused-Ion-Beam + Chemical Vapor Deposition for Accurate Off-Axis Electron Holography

Nakamatsu, Ken-ichiro, Yamamoto, Kazuo, Hirayama, Tsukasa, Matsui, Shinji

Journal:

Applied Physics Express

Year:

2008

Language:

english

File:

PDF, 556 KB

english, 2008

11

Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane (HSQ)

Nakamatsu, Ken-ichiro, Ishikawa, Kiyoshi, Taneichi, Noriaki, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2007

Language:

english

File:

PDF, 341 KB

english, 2007

12

Evaluation of Fluorinated Diamond Like Carbon as Antisticking Layer by Scanning Probe Microscopy

Okada, Makoto, Iwasa, Masayuki, Nakamatsu, Ken-ichiro, Yamada, Noriko, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2008

Language:

english

File:

PDF, 331 KB

english, 2008

13

Nanoimprinting using release-agent-coated resins

Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 360 KB

english, 2009

14

Room-Temperature Nanoimprint using Sol-Gel ITO Film

Kang, Yuji, Okada, Makoto, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Kanda, Kazuhiro, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2009

Language:

english

File:

PDF, 568 KB

english, 2009

15

Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane

Okada, Makoto, Nakamatsu, Ken-ichiro, Iwasa, Masayuki, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Applied Physics Express

Year:

2009

Language:

english

File:

PDF, 518 KB

english, 2009

16

Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold

Nakamatsu, Ken-ichiro, Yamada, Noriko, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 373 KB

english, 2006

17

Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold

Yamada, Noriko, Nakamatsu, Ken-ichiro, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 83 KB

english, 2007

18

Characterization of Nanoimprint Resin and Antisticking Layer by Scanning Probe Microscopy

Okada, Makoto, Kang, Yuji, Nakamatsu, Ken-ichiro, Iwasa, Masayuki, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2009

Language:

english

File:

PDF, 411 KB

english, 2009

19

Room-Temperature Nanoimprint using Liquid-Phase Hydrogen Silsesquioxane with PDMS mold

Kang, Yuji, Okada, Makoto, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Kanda, Kazuhiro, Matsui, Shinji

Journal:

Journal of Photopolymer Science and Technology

Year:

2009

File:

PDF, 472 KB

2009

20

Nanostructure Analysis of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

Nakamatsu, Ken-ichiro, Ichihashi, Toshinari, Kanda, Kazuhiro, Haruyama, Yuichi, Kaito, Takashi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 394 KB

english, 2009

21

Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film

Nakamatsu, Ken-ichiro, Tone, Katsuhiko, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 721 KB

english, 2006

22

Characteristics of Antisticking Layer Formed by CHF 3 Plasma Irradiation for Nanoimprint Molds

Okada, Makoto, Nakamatsu, Ken-ichiro, Kang, Yuji, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 336 KB

english, 2009

23

Bilayer Resist Method for Room-Temperature Nanoimprint Lithography

Nakamatsu, Ken-ichiro, Watanabe, Keiichiro, Tone, Katsuhiko, Katase, Tetsuya, Hattori, Wataru, Ochiai, Yukinori, Matsuo, Takahiro, Sasago, Masaru, Namatsu, Hideo, Komuro, Masanori, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 177 KB

english, 2004

24

Novel DNA Nano-Patterning Design Method Utilizing Poly-L-Lysine Patterning by Nanoimprint Lithography

Ohtake, Toshihito, Nakamatsu, Ken-Ichiro, Matsui, Shinji, Tabata, Hitoshi, Kawai, Tomoji

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2006

Language:

english

File:

PDF, 374 KB

english, 2006

25

Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

Jun-ya Igaki, Reo Kometani, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Yukinori Ochiai, Jun-ichi Fujita, Takashi Kaito, Shinji Matsui

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 421 KB

english, 2006

26

Effect of Oxygen Plasma Irradiation on Hydrogen Silsesquioxane Nanopatterns Replicated by Room-Temperature Nanoimprinting

Kawamori, Masanori, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 373 KB

english, 2006

27

Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane

Nakamatsu, Ken-ichiro, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 209 KB

english, 2006

28

Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane

Nakamatsu, Ken-ichiro, Ishikawa, Kiyoshi, Taneichi, Noriaki, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 165 KB

english, 2007

29

Fabrication of High-Aspect Si Structures by Deep Reactive Ion Etching Using Hydrogen Silsesquioxane Masks Replicated by Room Temperature Nanoimprinting

Nakamatsu, Ken-ichiro, Okada, Makoto, Matsui, Shinji

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 132 KB

english, 2008

30

Fabrication of Organic Spin-on-Glass Microring Resonator with a Narrow Gap between a Microring Resonator and a Waveguide Using Nanoimprint Lithography

Okamoto, Hiroyuki, Yamaguchi, Kenzo, Nakamatsu, Ken-ichiro, Sogabe, Hidenori, Matsui, Shinji, Haraguchi, Masanobu, Okamoto, Toshihiro, Fukui, Masuo

Journal:

Japanese Journal of Applied Physics

Year:

2010

File:

PDF, 957 KB

2010

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